JPH037487U - - Google Patents

Info

Publication number
JPH037487U
JPH037487U JP6868489U JP6868489U JPH037487U JP H037487 U JPH037487 U JP H037487U JP 6868489 U JP6868489 U JP 6868489U JP 6868489 U JP6868489 U JP 6868489U JP H037487 U JPH037487 U JP H037487U
Authority
JP
Japan
Prior art keywords
closing valve
suction
electromagnetic opening
vacuum
vacuum switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6868489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6868489U priority Critical patent/JPH037487U/ja
Publication of JPH037487U publication Critical patent/JPH037487U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP6868489U 1989-06-13 1989-06-13 Pending JPH037487U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6868489U JPH037487U (en]) 1989-06-13 1989-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6868489U JPH037487U (en]) 1989-06-13 1989-06-13

Publications (1)

Publication Number Publication Date
JPH037487U true JPH037487U (en]) 1991-01-24

Family

ID=31603330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6868489U Pending JPH037487U (en]) 1989-06-13 1989-06-13

Country Status (1)

Country Link
JP (1) JPH037487U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003037576A1 (fr) * 2000-06-29 2003-05-08 Shibaura Mechatronics Corporation Appareil et procede de transfert de substrat
CN1298515C (zh) * 2001-11-01 2007-02-07 芝浦机械电子装置股份有限公司 基板输送装置和基板输送方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003037576A1 (fr) * 2000-06-29 2003-05-08 Shibaura Mechatronics Corporation Appareil et procede de transfert de substrat
CN1298515C (zh) * 2001-11-01 2007-02-07 芝浦机械电子装置股份有限公司 基板输送装置和基板输送方法

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